Ultra High Vacuum (UHV) Sample Manipulators

Precision movement and positioning of samples and substrates within a vacuum system is an essential process in material analysis or deposition. Each VACGEN manipulator family offers unique characteristics to offer the user the widest possible range of stability, cost and process conditions.

We offer both standard and customised manipulators to suit the exact requirements of your build. Samples and substrates can be moved with up to 5 axes of movement and can be heated and cooled under UHV conditions.

Need a bespoke drive solution? Our experts are happy to help. Contact us to discuss your project today.

Triax

Omniax Wide Bore

Omniax

A large clear bore manipulator with single bellows and a compact envelope easing integration into Ultra-High Vacuum systems.The universal orientation and small footprint of the Triax allows for the end-user to make better use of the air-side chamber space.

The Wide Bore Omniax was designed to be used with large cryostat cold fingers on DN100 flange. The larger top section of the in vacuum part of the cryostat cold finger fits into the 100mm Clear Bore Z bellows. The X and Y table is designed to take a cryostat which normally would have it’s own support tube of 54 mm. This gives you the maximum of ±25 mm of travel. The Omniax manipulator is a fully UHV compatible double bellows manipulator with large probe capacity. It uses the unique VACGEN hinged flange and guided support tube to eliminate deflection due to vacuum loading providing extreme stability. It’s rigidity makes it ideal for long travels, multiple rotations, specimen security and capacity for feedthroughs

Miniax

Transax

HPT

The Miniax XYZ manipulator offers a source of simple, low cost, manually driven manipulation. The single bellows construction makes it easy to use in any orientation. Despite the simple construction of the manipulator, the Miniax has good precision and is fully UHV compatible. The Transax is a fully UHV compatible double bellows manipulator, which is stable and versatile. It has a long travel range and is compatible with standard VACGEN sample handling equipment and rotary drive modules. Combines linear Z slide with an XY table bolted together to give a rigid interface for sample handling. The HPT High Precision manipulator is a simple, cost effective, single bellows, translator designed as a small compact and light manipulator platform. The wide bore of the HPT allows probe diameters of up to 19mm with full vectorial movement of +/- 12.5mm and can be fully motorised.

Downloads

Manipulation Brochure 2021

Catalogue - Modular Manipulation

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