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Since 1963 VACGEN have been supplying the Research and Scientific community with ultra-high vacuum equipment. With our long history of designing and developing core UHV components, we have been the partners of choice for leading institutes around the world. If you cannot find the product you are looking for in our catalogue components then please contact us on sales@vacgen.com and we will be happy to assist.

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  1. 114mm OD - 304L Fixed Blank CF Flange
    SKU: CF114
    4 to 6 weeks delivery
    £35.02
    Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.
  2. 114mm OD - 304L Rotable Blank CF Flange
    SKU: CFR114
    4 to 6 weeks delivery
    £241.66
    Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.
  3. 114mm OD - 304L Tapped Fixed Blank CF Flange
    SKU: CF114T
    £45.16
    Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.
  4. 114mm OD - 316LN (2D) Fixed Blank CF Flange
    SKU: CF114-LN
    £123.03
    Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.
  5. 114mm OD - 316LN (2D) Rotable Blank CF Flange
    SKU: CFR114-LN
    £213.12
    Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.
  6. 114mm OD - 316LN (2D) Tapped Fixed Blank CF Flange
    SKU: CF114T-LN
    4 to 6 weeks delivery
    £164.41
    Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.
  7. 114mm OD 70mm ID - 304L Fixed Bored CF Flange
    SKU: CF114-70
    £39.37
    Fixed bored Conflat flange (CF) are available in the full range of sizes. The smaller range of flange can accept a number of different standard tube sizes. These are prepared ready for welding onto chamber tubulations or components.
  8. 114mm OD 70mm ID - 304L Rotable Bored CF Flange
    SKU: CFR114-70
    £39.93
    Rotatable bored Conflat Flange (CF) are available in the full range of sizes. The smaller range of flange can accept a number of different standard tube sizes. These are prepared ready for welding onto chamber tubulations or components. The rotatable flange consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part.
  9. 114mm OD 70mm ID - 304L Tapped Fixed Bored CF Flange
    SKU: CF114T-70
    £49.83
    Fixed bored Conflat flange (CF) are available in the full range of sizes. The smaller range of flange can accept a number of different standard tube sizes. These are prepared ready for welding onto chamber tubulations or components.
  10. 114mm OD 70mm ID - 304L Tapped Rotable Bored CF Flange
    SKU: CFR114T-70
    4 to 6 weeks delivery
    £55.19
    Rotatable bored Conflat Flange (CF) are available in the full range of sizes. The smaller range of flange can accept a number of different standard tube sizes. These are prepared ready for welding onto chamber tubulations or components. The rotatable flange consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part.
  11. 114mm OD 70mm ID - 316LN (2D) Fixed Bored CF Flange
    SKU: CF114-70-LN
    £123.03
    Fixed bored Conflat flange (CF) are available in the full range of sizes. The smaller range of flange can accept a number of different standard tube sizes. These are prepared ready for welding onto chamber tubulations or components.
  12. 114mm to 34mm OD 304L Zero Length Bored Adaptors
    SKU: CFZL114-34
    4 to 6 weeks delivery
    £303.70
    Zero Length Adaptor conflat Flange (CF) are used to adapt from one flange size to another. The larger flange OD has through bolt holes enabling ordinary nut and bolt to be used. The smaller flange OD has metric tapped holes. This connects different sizes of flanges where there is limited space and does not increase the chamber volume.
  13. 114mm to 70mm OD 304L Zero Length Bored Adaptors
    SKU: CFZL114-70
    £96.16
    Zero Length Adaptor conflat Flange (CF) are used to adapt from one flange size to another. The larger flange OD has through bolt holes enabling ordinary nut and bolt to be used. The smaller flange OD has metric tapped holes. This connects different sizes of flanges where there is limited space and does not increase the chamber volume.
  14. 114mm to 70mm OD 316LN (2D) Zero Length Bored Adaptors
    SKU: CFZL114-70-LN
    4 to 6 weeks delivery
    £155.26
    Zero Length Adaptor conflat Flange (CF) are used to adapt from one flange size to another. The larger flange OD has through bolt holes enabling ordinary nut and bolt to be used. The smaller flange OD has metric tapped holes. This connects different sizes of flanges where there is limited space and does not increase the chamber volume.
  15. All Metal Body Right Angled Viton® Sealed Valve - 2 x Rotatable DN64C
    SKU: ZVR60R
    4 to 6 weeks delivery
    £1,505.03
    The VR valves are right angled general purpose UHV valves with a cycle usage minimum of 100,000 activations. The bonnet (top) seal of the valve is welded on the VR series.
  16. All Metal Manual Right Angle Valve - 2 x Rotatable DN64CF
    SKU: ZCR60R
    £1,245.44
    Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.
  17. All Metal Manual Right Angle Valve Demountable- 2 x Rotatable DN64CF
    SKU: ZCRD60R
    4 to 6 weeks delivery
    £2,332.45
    Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.
  18. Bearing Cage Sets MLRV/MLRM 4 Series Front & Rear
    SKU: MLRMBRK4
    4 to 6 weeks delivery
    £460.84
    Spares for Mag Probes
  19. Bellows Assembly GV50 - 50 Convolutions
    SKU: GV50BA
    4 to 6 weeks delivery
    £1,876.85
    Bellows Assembly
  20. Cross 4 Way DN64 1 Fixed (Inline) & 1 Rot Axis
    SKU: ZBX464RI
    4 to 6 weeks delivery
    £461.91
    Four way cross with flanges equally spaced at 90° to each other. On each axis, one of the flanges is fixed and the other is rotatable. The fixed flange comes in two versions of bolt hole orientation, inline or straddled configuration, enabling the connection in any orientation of the vacuum equipment.
  21. Cross 4 Way DN64 1 Fixed (Straddled) & 1 Rot Axis
    SKU: ZBX464RS
    4 to 6 weeks delivery
    £485.00
    Four way cross with flanges equally spaced at 90° to each other. On each axis, one of the flanges is fixed and the other is rotatable. The fixed flange comes in two versions of bolt hole orientation, inline or straddled configuration, enabling the connection in any orientation of the vacuum equipment.
  22. Cross 6 Way DN64 1 Fixed (Inline) & 1 Rot/Axis
    SKU: ZBX664RI
    £820.92
    Six way cross with flanges equally spaced at 90° to each other. On each axis, one of the flanges is fixed and the other is rotatable. The fixed flange comes in two versions of bolt hole orientation, inline or straddled configuration, enabling the connection in any orientation of the vacuum equipment.
  23. Cross 6 Way DN64 1 Fixed (Straddled) & 1 Rot/Axis
    SKU: ZBX664RS
    Special Price £492.55 Regular Price £820.92
    Six way cross with flanges equally spaced at 90° to each other. On each axis, one of the flanges is fixed and the other is rotatable. The fixed flange comes in two versions of bolt hole orientation, inline or straddled configuration, enabling the connection in any orientation of the vacuum equipment.
  24. Elbow Curved 2 Rotatable DN64CF
    SKU: ZBE64R
    4 to 6 weeks delivery
    £340.47
    90° Radius elbows, on each axis, one of the flanges is fixed and the other is rotatable. The fixed flange comes in two versions of bolt hole orientation, inline or straddled configuration, enabling the connection in any orientation of the vacuum equipment.
  25. Flange Tubulated Fixed DN100CF
    SKU: ZBFT64
    4 to 6 weeks delivery
    £239.45
    Flange with tubulation enabling welding without risking conflat knife edge damage. Specifically designed and manufactured for vacuum system designers and manufacturers of vacuum components.
  26. Flange Tubulated Rotatable DN100CF
    SKU: ZBFT64R
    4 to 6 weeks delivery
    £265.49
    Flange with tubulation enabling welding without risking conflat knife edge damage. Specifically designed and manufactured for vacuum system designers and manufacturers of vacuum components.
  27. Gasket OFHC Copper Pk 10 114 OD Flange Etched 64mm I.D
    SKU: ZCU64
    Super clean ultra high quality oxygen free surface etched copper gaskets for use in UHV application where there are no compromises in quality. These are rumbled to remove all the burrs, etched to remove surface skin, UHV cleaned and individually packed.
  28. Gasket OFHC Copper Pk 10 114 OD Flange Etched 68mm I.D
    SKU: ZCU68
    4 to 6 weeks delivery
    Super clean ultra high quality oxygen free surface etched copper gaskets for use in UHV application where there are no compromises in quality. These are rumbled to remove all the burrs, etched to remove surface skin, UHV cleaned and individually packed.
  29. Gasket OFHC Copper Pk 10 114 OD Flange Sil/Plated 68mm I.D
    SKU: ZCUSP68
    Super clean ultra high quality oxygen free Silver plated gasket. These are rumbled to remove all the burrs, etched to remove surface skin prior to silver plating, UHV cleaned and individually packed. Completely free from any nickel flash base coat. Recommended for use in HV & UHV systems where the vacuum environment could oxidise a plain copper gasket.
  30. Gasket OFHC Copper Pk 5 114 OD Flange Annealed Etch 68mm ID
    SKU: ZCUA68
    Super clean ultra high quality oxygen free annealed copper gaskets for lower tightening torque to make a UHV leak tight seal. These are rumbled to remove all the burrs, UHV cleaned and individually packed. Recommended for use where you are using zero length viewports and fragile ceramic feedthroughs.
  31. Gasket OFHC Copper Pk 5 114 OD Flange Annealed Etch 64mm ID
    SKU: ZCUA64
    Super clean ultra high quality oxygen free annealed copper gaskets for lower tightening torque to make a UHV leak tight seal. These are rumbled to remove all the burrs, UHV cleaned and individually packed. Recommended for use where you are using zero length viewports and fragile ceramic feedthroughs.
  32. Gasket OFHC Copper Pk 50 114 OD Flange Unetched 68mm I.D
    SKU: ZCUC68
    High quality oxygen-free copper gaskets for university and commercial use. These are rumbled to remove all the burrs, UHV cleaned and individually packed. Designed for UHV applications where high usage or bulk purchase pricing is required.
  33. Gasket Viton® Pk 2 114 OD Flange
    SKU: ZVIT64
    Viton® gaskets are used in HV applications with low bakeout temperatures (
  34. Hinged Door DN64CF
    SKU: ZHD64
    4 to 6 weeks delivery
    £1,316.61
    HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.
  35. Hinged Viewport Door DN63CF
    SKU: ZHD64V
    4 to 6 weeks delivery
    £1,531.07
    HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.
  36. Kodial 304L DN64CF Viewport
    SKU: ZVPZ64
    £147.84
    A zero length viewport has a thickness no larger than that of its mounting flange. This makes it easier to protect from accidental damage. It provides the best angle of view as there are no tubulation walls to restrict observation. Kodial viewports are offered in CF flange styles. The viewports comprise borosilicate glass optic which is sealed to a Kovar weld ring using an induction heater process. The optic assemblies are helium leak tested and cleaned for ultra high vacuum (UHV) conditions.
  37. Kodial 316LN DN64CF Viewport
    SKU: ZVPZL64
    4 to 6 weeks delivery
    £248.58
    A zero length viewport has a thickness no larger than that of its mounting flange. This makes it easier to protect from accidental damage. It provides the best angle of view as there are no tubulation walls to restrict observation. Kodial viewports are offered in CF flange styles. The viewports comprise borosilicate glass optic which is sealed to a Kovar weld ring using an induction heater process. The optic assemblies are helium leak tested and cleaned for ultra high vacuum (UHV) conditions.
  38. Linear Drive 114mm OD 100mm Z Handwheel (19mm Hex)
    SKU: ZLTM114100HW
    4 to 6 weeks delivery
    £3,023.80
    Linear Drive 114mm OD 100mm Z Handwheel (19mm Hex)
  39. Linear Drive 114mm OD 100mm Z Step/Motor Encoder M/switches
    SKU: ZLTM114100SMSE
    4 to 6 weeks delivery
    £4,059.45
    Linear Drive 114mm OD 100mm Z Step/Motor Encoder M/switches
  40. Linear Drive 114mm OD 100mm Z Stepper Motor M/switches
    SKU: ZLTM114100SMS
    4 to 6 weeks delivery
    £3,575.62
    Linear Drive 114mm OD 100mm Z Stepper Motor M/switches
  41. Linear Drive 114mm OD 150mm Z Handwheel
    SKU: ZLTM114150HW
    4 to 6 weeks delivery
    £2,980.97
    Linear Drive 114mm OD 150mm Z Handwheel
  42. Linear Drive 114mm OD 150mm Z Step/Motor Encoder M/switches
    SKU: ZLTM114150SMSE
    4 to 6 weeks delivery
    £4,056.91
    Linear Drive 114mm OD 150mm Z Step/Motor Encoder M/switches
  43. Linear Drive 114mm OD 150mm Z Stepper Motor M/switches
    SKU: ZLTM114150SMS
    4 to 6 weeks delivery
    £3,643.14
    Linear Drive 114mm OD 150mm Z Stepper Motor M/switches
  44. Linear Drive 114mm OD 25mm Z Handwheel
    SKU: ZLTM11425HW
    4 to 6 weeks delivery
    £1,995.79
    Linear Drive 114mm OD 25mm Z Handwheel
  45. Linear Drive 114mm OD 25mm Z Step/Motor Encoder M/switches
    SKU: ZLTM11425SMSE
    4 to 6 weeks delivery
    £2,994.18
    Linear Drive 114mm OD 25mm Z Step/Motor Encoder M/switches
  46. Linear Drive 114mm OD 25mm Z Stepper Motor M/switches
    SKU: ZLTM11425SMS
    4 to 6 weeks delivery
    £2,631.30
    Linear Drive 114mm OD 25mm Z Stepper Motor M/switches
  47. Linear Drive 114mm OD 50mm Z Handwheel
    SKU: ZLTM11450HW
    4 to 6 weeks delivery
    £2,248.47
    Linear Drive 114mm OD 50mm Z Handwheel
  48. Linear Drive 114mm OD 50mm Z Step/Motor Encoder M/switches
    SKU: ZLTM11450SMSE
    4 to 6 weeks delivery
    £3,342.29
    Linear Drive 114mm OD 50mm Z Step/Motor Encoder M/switches
  49. Linear Drive 114mm OD 50mm Z Stepper Motor M/switches
    SKU: ZLTM11450SMS
    4 to 6 weeks delivery
    £2,858.46
    Linear Drive 114mm OD 50mm Z Stepper Motor M/switches
  50. Linear Drive 114mm OD 75mm Z Handwheel
    SKU: ZLTM11475HW
    4 to 6 weeks delivery
    £2,638.97
    Linear Drive 114mm OD 75mm Z Handwheel
  51. Linear Drive 114mm OD 75mm Z Step/Motor Encoder M/switches
    SKU: ZLTM11475SMSE
    4 to 6 weeks delivery
    £3,727.66
    Linear Drive 114mm OD 75mm Z Step/Motor Encoder M/switches
  52. Linear Drive 114mm OD 75mm Z Stepper Motor M/switches
    SKU: ZLTM11475SMS
    4 to 6 weeks delivery
    £3,243.83
    Linear Drive 114mm OD 75mm Z Stepper Motor M/switches
  53. Mag Drive Linear & Rotation 1.25m Travel 114mm OD Flange
    SKU: ZMLRV412
    4 to 6 weeks delivery
    £3,257.94
    High power all metal magnetically coupled coarse linear and rotary transfer device for UHV applications, using only UHV accepted metals within its construction. Providing smooth sample transfer movement within the vacuum chamber, where high accuracy is not required.
  54. Mag Drive Linear & Rotation 1.45m Travel 114mm OD Flange
    SKU: ZMLRV414
    4 to 6 weeks delivery
    £3,158.20
    High power all metal magnetically coupled coarse linear and rotary transfer device for UHV applications, using only UHV accepted metals within its construction. Providing smooth sample transfer movement within the vacuum chamber, where high accuracy is not required.
  55. Mag Drive Linear & Rotation 610mm Travel 114mm OD Flange
    SKU: ZMLRV406
    4 to 6 weeks delivery
    £2,638.75
    High power all metal magnetically coupled coarse linear and rotary transfer device for UHV applications, using only UHV accepted metals within its construction. Providing smooth sample transfer movement within the vacuum chamber, where high accuracy is not required.
  56. Mag Drive Linear & Rotation 914mm Travel 114mm OD Flange
    SKU: ZMLRV409
    £2,764.71
    High power all metal magnetically coupled coarse linear and rotary transfer device for UHV applications, using only UHV accepted metals within its construction. Providing smooth sample transfer movement within the vacuum chamber, where high accuracy is not required.
  57. Port Aligner 114mm OD
    SKU: ZPA63CF
    4 to 6 weeks delivery
    £1,249.56
    Allows the precise mechanical alignment for sample transfer and docking systems i.e. MLRV and RLRP. Cost effective way to save time during system installation where sample transfer tools are being set up for the first time.
  58. Rotary Feedthrough Bearing Replacement Set DPRF55/DPRF552
    SKU: ZDPRF55B
    4 to 6 weeks delivery
    £163.53
    DPRF Spares
  59. Rotary Feedthrough DPRF55 Seal Kit fits all 2 Seal Versions
    SKU: ZXSMS03
    4 to 6 weeks delivery
    £0.00
    Spares for the DPRF55 & 552
  60. Rotary Feedthrough DPRF552 Seal Kit fits all 3 Seal Versions
    SKU: ZXSMS03-3
    4 to 6 weeks delivery
    £455.11
    Spares for the DPRF55 & 552
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