| Transax XY Module - Technical Data | ||
| Parameter | Specification | |
| Resolution - Manual | All Stages | 5 microns |
| Resolution - Motorised | T208 -12.5 Stage | 0.5 microns |
| Resolution - Motorised | T208 Stages | 0.5 microns |
| Repeatability - Manual | All Stages | 5 microns |
| Repeatability- Motorised | T208-12.5 Stage | 1 microns |
| Repeatability- Motorised | T208 Stages | 1 microns |
| Transax XY Stage Modules and Accessories | |
| XY Stage Module - 152 mm OD Base Flange | Order Code |
| ±0 mm Adaptor | ZT000A6S |
| ±12.5 mm Stage | ZT208A6-12.5 |
| ±25.0 mm Stage | ZT208A6S |
| XY Stage Motorisation | Order Code |
| X and Y Axis Stepper Motor * | MTXYMOTW * |
| X and Y Axis Stepper Motor and Encoder * | MTXYMOTE * |
| Horizontal Compensation Stand | Order Code |
| Horizontal Compensation Stand | MHSA |
| Compensating Stand for Z-only Option | ZTRS |
| * Single Axis Kits for X or Y Motorisation | |
Features
- Full ±25.0mm movement in both the X and Y
- 54mm clear bore at X and Y full travel
- Double bolt holes on mounting flange
- Large barrel 5 micron graduations micrometers as standard
- Retrofitable motorisation
- Stepper motor option complete with limit switches
- Encoded motors also available.
- Operating pressure 1 bar to 10-11 mbar
- Leak rate <1x10-10 mbar l-s
- Bakeable to 230°C
Manual Operation
- 10 micron resolution
- 10 micron repeatability
Stepper motors
- 0.5 micron resolution
- 0.5 micron repeatability using
- 4 mm.s-1 maximum speed