Engineering Solutions for the Semiconductor Industry

Over 20 years supplying chambers, components and sub assemblies engineered and made to SEMI standards, copy exactly and clean room ready


Our chambers are used for ALD, PVD and etch applications in series production.


Stages, Heater assemblies, Storage cassettes, Shutters, gas panels, wafer handlers are built in a class 7 clean room all suitable for use under vacuum.


Our engineering teams support design projects from concept design through to series production. Projects include the complex design of electromechanical assemblies or chambers complete with material selection, structual and thermal analysis.


We are a trusted supplier of vacuum companies big and small and would love to be at the heart of your supply chain.

State of the art production line

Our production facility is a purpose built state-of-the-art building, designed around machining centres and flow lines for volume production capacity.

Everything under one roof

From 5-axis complex geometrical chambers with post-welding operations to ultra high vacuum cleaning techniques, we have everything under one roof.

Experts in UHV

Ultra-high vacuum product design and manufacture has been a central part of our business for over 50 years and we have the skills and knowledge to undertake your UHV project.

Our Customers

Contact VACGEN to discuss your requirements

Submit your technical drawings

Vacgen will work with you from your initial concept to the final installed working system. You will be assigned a dedicated customer service manager who will keep you informed at every step of the process. Please upload your drawing documents to this form.

Just need to talk to our experts?

Call us on +44 (0) 1323 379379