Omniax Z Slide

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SKU
Omniax Z Slide

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Omniax Z Slide - Basic Dimensions
Z Travel mm A1 mm C mm Order Code and stp. file
100 184 to 284 374 MXZ100
200 186 to 386 477 MXZ00
300 - to 486 577 MXZ300
400 186 to 586 677 MXZ400
500 - to 708 799 MXZ500
600 229 to 829 920 MXZ600
800 273 to 1073 1164 MXZ800
1000 317 to 1317 1408 MXZ1000

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Features

  • Robust, rigid construction
  • 100mm to 1000mm travel (longer on request)
  • Large 54mm clear bore edge welded bellows
  • 114mm OD conflat travelling flange
  • Ultimate stability for long Z travel manipulation
  • Anti-backlash drives
  • Hinged knee concept for initial assembly and test alignment
  • Cross roller slide-ways and recirculating ball linear guide bushes
  • Motorisation upgradable to Stepper motor or DC motor
  • Compatible with standard Conflat rotary drives
  • Large load capacity
  • Upgrade to Rotating support tube option.
  • Feedthrough chamber with 4 radial mini ports
  • Operating pressure 1 bar to 10-11 mbar
  • Leak rate <1x10-10 mbar l-s

Z module offers the following:

Manual operation:
  • 10 micron resolution
  • 10 micron repeatability
VACGEN controlled stepper motors:
  • 0.5 micron resolution
  • 0.5 micron repeatability using 4 mm.s-1 maximum speed