Semiconductor Electromechanical Assemblies Campaign Page

Customised High and Ultra-High Vacuum Electromechanical Assemblies for the Semiconductor Industry

VACGEN build wafer fabrication equipment to customer design. The products are all built in a class 7 cleanroom within a manufacturing flow line for the best scalable and cost-effective outsourced solution for our Semiconductor customers. Wafer fabrication equipment could include wafer storage cassettes, metrology and inspection tools, heater stages or shutter assemblies.

Need a build-to-print solution? We adhere to Copy Exactly! techniques

Within any vacuum chamber there are high tech electromechanical assemblies. Typical assemblies would be built to print to the customer’s design. At VACGEN we have manufacturing flow lines for the best scalable approach to manufacturing production volume “copy exact” type assemblies. Our assemblies are fabricated from high-quality materials and are built to stringent SEMI standards, ensuring that they will meet the requirements of even the most demanding and specific applications.

Vacuum Environments

Wafer Fabrication Equipment (WFE) manufactured for cleanroom ready environments

Electromechanical devices used in semiconductor manufacturing tools often need to be vacuum-compatible due to the specific requirements of semiconductor fabrication processes. Maintaining a vacuum environment is essential for several reasons, including controlling contamination, enhancing process control, and improving the quality of semiconductor devices. We therefore supply vacuum system designs and products that are precisely and specifically cleaned according to the SEMI requirements. Our in-house cleaning processes and leak check certification ensures the very best vacuum performance and a contamination free environment.

Securing your equipment production line in times of high demand


Setting up manufacturing flow lines is an essential step to ensure 100% quality and on time delivery. VACGEN work with our customers and raw material supply chain to set up material supply agreements, blanket orders and forecasts locking future supply for extended periods. We understand the cyclical nature of your business, and wafer fabrication equipment requirements for on-time deliveries.

Why Choose VACGEN?

With over 50 years industry experience, our core competence is in the expert design, engineering, manufacture and clean-room assembly of chambers and manipulation subsystems, offering a wide portfolio of high and ultra-high vacuum chambers for multiple applications in the semiconductor industry. From the manufacture of the first UHV valve to some of the most advanced vacuum research systems built, our long spanning history has given us an incredible grounding in the needs of our customers and how we can support new projects through the design phase, product delivery and installation, and ongoing support.


We are a trusted supplier of vacuum companies big and small and would love to be at the heart of your supply chain.

State of the art
State of the art production line

Our production facility is a purpose built state-of-the-art building, designed around machining centres and flow lines for volume production capacity.

Everything under one roof

From 5-axis complex geometrical chambers with post-welding operations to ultra high vacuum cleaning techniques, we have everything under one roof.

Experts in UHV
Experts in UHV

Ultra-high vacuum product design and manufacture has been a central part of our business for over 50 years and we have the skills and knowledge to undertake your UHV project.

Organisations who trust VACGEN technology