| Omniax XY Stage Modules and Accessories | ||
| Base Flange | Travel Range | Order Code and stp. file |
| NW100CF (6"" OD) | Z-only ±0 mm | MT000B6S |
| NW100CF (6"" OD) | ±12.5 mm Stage | POA |
| NW100CF (6"" OD) | ±25.0 mm Stage | MT211B6S |
| NW150CF (8"" OD) | Z-only ±0 mm | ZT000B8S |
| NW150CF (8"" OD) | ±12.5mm Stage | POA |
| NW150CF (8"" OD) | ±25.0 mm Stage | ZT211B8S |
| XY Module Motorisation | ||
| XY Module Motorisation | Order Code | |
| X Axis Stepper Motor | MTXYMOTW* | |
| Y Axis Stepper Motor and Encoder | MTXYMOTE* | |
| *Single Axis Kits | ||
| Omniax XY Module - Basic Dimensions | ||||
| XY Travel mm | Basic Code of XY stage | A2 mm | Bellows Bore D mm | Support tube |
| ±25.0 | T211-12.5 | 175 | 108 | 28 or 54mm |
| ±25.0 | T211 | 175 | 108 | 28 or 54mm |
Features
- Single edge welded bellows
- Full ±25.0mm movement in both the X and Y
- 54mm clear bore at X and Y full travel
- Double bolt holes on mounting flange
- Large barrel 5 micron graduations micrometers as standard
- Retrofitable Motorisation
- Stepper motor with limit switch options
- Encoded motors are also available.
- Bakeable to 230°C
- Operating pressure 1 bar to 10-11 mbar
- Leak rate <1x10-10 mbar l-s
Manual operation
- 10 micron resolution
- 10 micron repeatability
Stepper motors
- 0.5 micron resolution
- 0.5 micron repeatability using 4 mm.s-1 maximum speed