Omniax XY Stage Module

Available for Quote
SKU
Omniax XY Stage Module

File(s)

Omniax XY Stage Modules and Accessories
Base Flange Travel Range Order Code and stp. file
NW100CF (6"" OD) Z-only ±0 mm MT000B6S
NW100CF (6"" OD) ±12.5 mm Stage POA
NW100CF (6"" OD) ±25.0 mm Stage MT211B6S
NW150CF (8"" OD) Z-only ±0 mm ZT000B8S
NW150CF (8"" OD) ±12.5mm Stage POA
NW150CF (8"" OD) ±25.0 mm Stage ZT211B8S
 
XY Module Motorisation
XY Module Motorisation  Order Code
X Axis Stepper Motor MTXYMOTW*
Y Axis Stepper Motor and Encoder MTXYMOTE*
*Single Axis Kits
Omniax XY Module - Basic Dimensions
XY Travel mm Basic Code of XY stage A2 mm Bellows Bore D mm Support tube
±25.0 T211-12.5 175 108 28 or 54mm
±25.0 T211 175 108 28 or 54mm

File(s)

Features

  • Single edge welded bellows
  • Full ±25.0mm movement in both the X and Y
  • 54mm clear bore at X and Y full travel
  • Double bolt holes on mounting flange
  • Large barrel 5 micron graduations micrometers as standard
  • Retrofitable Motorisation
  • Stepper motor with limit switch options
  • Encoded motors are also available.
  • Bakeable to 230°C
  • Operating pressure 1 bar to 10-11 mbar
  • Leak rate <1x10-10 mbar l-s
Manual operation
  • 10 micron resolution
  • 10 micron repeatability
Stepper motors
  • 0.5 micron resolution
  • 0.5 micron repeatability using 4 mm.s-1 maximum speed