UHV Sample Manipulation

Our extensive range of customised Ultra High Vacuum (UHV) sample manipulators are designed specifically for vacuum systems. Precision movement and positioning of samples and substrates within a vacuum system is an essential process in material analysis or deposition. Each VACGEN manipulator family offers unique characteristics, ensuring that users have access to the widest possible range of stability, cost-effectiveness, and process conditions.

Widebore Omniax

The Wide Bore Omniax was designed to be used with large cryostat cold fingers on DN100 flange. The larger top section of the in vacuum part of the cryostat cold finger fits into the 100mm Clear Bore Z bellows.

Omniax

The Omniax manipulator is a fully UHV compatible double bellows manipulator with large probe capacity. It uses the unique VACGEN hinged flange and guided support tube to eliminate deflection due to vacuum loading providing extreme stability.

Triax

A large clear bore manipulator with single bellows and a compact envelope easing integration into Ultra-High Vacuum systems. The universal orientation and small footprint of the Triax allows for the end-user to make better use of the air-side chamber space.

Transax

The Transax is a fully UHV compatible double bellows manipulator, which is stable and versatile. It has a long travel range and is compatible with standard VACGEN sample handling equipment and rotary drive modules.

HPT

The HPT High Precision manipulator is a simple, cost effective, single bellows, translator designed as a small compact and light manipulator platform.

Miniax

The Miniax XYZ manipulator offers a source of simple, low cost, manually driven manipulation. The single bellows construction makes it easy to use in any orientation. Despite the simple construction of the manipulator, the Miniax has good precision and is fully UHV compatible.

Designing a Manipulator?

Sample Manipulation Accessories

Sample Holders

Sample holders are the interface between the sample and the movements of the manipulator. Let's explore what VACGEN have to offer

Rotary Drive Modules

Rotary drives can provide primary and azimuthal rotation into the chamber and are fully tailored to the custom manipulator

Sample Heating

Resistive and Electron Beam Heater Modules can be fitted to the sample holders to provide sample heating up to 1200°C

Liquid Nitrogen Cooling

Liquid Nitrogen Cooling can be configured to the manipulator providing cooling down to temperatures of -165°C

Motor Controllers

Stepper Motor Controllers are available to power and control all motorised instruments for X, Y, Z and R1, R2, R3 axes. These can be configured up to 99 axes and in open or closed loop

Rotary Platforms and DPRFs

Differentially Pumped Rotary Feedthroughs (DPRF) and Rotary Platforms can be fitted to the manipulator to provide additional means of rotation into the chamber

XY Modules

XY Tables provide up to ±25mm travel for the X & Y axis. These axes can be fully motorised to improve accuracy and repeatability

Support Stands

Larger manipulators require support stands to stabilise the manipulator when mounted in a horizontal orientation.

UHV Sample Manipulation

UHV Sample Manipulation

Widebore Omniax

Omniax

Triax

Transax

HPT

Miniax

Designing a Manipulator?

Sample Manipulation Accessories

Sample Holders

Rotary Drive Modules

Sample Heating

Liquid Nitrogen Cooling

Motor Controllers

Rotary Platforms and DPRFs

XY Modules

Support Stands

Start Your Journey with VACGEN today

Start Your Journey
with VACGEN today