Omniax UHV Sample Manipulator

Ultra High Vacuum Dual Bellows Manipulator

The Omniax is a fully UHV compatible dual bellows manipulator with large probe capacity. The design utilises the unique VACGEN hinged knee assembly and guided support tube to eliminate sample deflection due to vacuum loading, providing extreme stability. The rigidity of the design makes it ideal for long travel lengths, multiple rotations, specimen security and capacity for feedthroughs.


The dual bellows manipulator is fully modular in design and can be built up to accommodate many different applications ranging from material analysis to complex deposition processes. After selecting the X,Y,Z carcass, additional methods of rotation can be added in the form of rotary drives and DPRFs, and sample holder modules with heating and cooling can be selected to create the ultimate manipulator for your application.

Omniax II

FAQs, Manuals and Data Sheets

Key Features

Optional Base Flange Sizes

152mm OD CF Flange Tapped Holes or 203mm OD CF Flange Clear Holes

±25mm X and Y Axes

Instruments Up To 50mm OD with Full XY Travel

Z Travel Lengths

100mm to 1000mm Travel

High Load Capacity

20Kg Payload Horizontal or Vertical Orientation

Motorisation Options

All Axes Can Be Fully Motorised

Liquid Nitrogen Cooling

Optional Module

Mounting Orientation

Horizontal, Vertical & Inverted

Support Stands Available

Required for Horizontal Mounting

Designed for Primary & Azimuthal Rotary Drives

Supports All Standard Sample Holder Configurations

Standard Feedthrough Chamber

Dedicated Liquid Nitrogen Cooling Port Plus 3 Radial Feedthrough Ports

Extremely Robust Construction

Proprietary Design on Hinged Knee Assembly

Optional Support Tube Sizes

32mm (28mm Clear Bore) or 54mm (50mm Clear Bore)

Rotating Support Tube

Optional with DPRF Module

Fully Bakeable to 230°C

With Motors Removed

Design Eliminates Bi-Metal Deformation

Even After Repeated Bakeouts to 230°C

Operating Pressure

1 bar to 1x10-11 mbar

Leak Rate

1x10-10 mbar ls -1

Construction Advantages Include

All Metal Re-circulating Bearings for Z Axis & All Metal V Slides for X&Y Table

Information XY Table

XY Table Overview

±0mm, ±12.5mm or ±25mm Precision Movement

With 32mm or 54mm Support Tube

5µm Graduations on Micrometers

Optional Motor Upgrade

Stepper Motors, Encoded Stepper Motors and Limit Switches

Plugs Wired To Suit VACGEN Controllers

Motorised 1 Turn = 0.2mm

Ratio 5:1

Design Advantage

All Metal V Slides


XY Parameters Actuation Method Specification
Resolution Manual 10µm
Resolution Motorised 0.5µm
Repeatability Manual 10µm
Repeatability Motorised 1µm
Maximum Speed Motorised 4 mm.s-1

XY Table

XY Travel mm A2 Dimension mm Bellows Bore ⌀mm
±0 80 95
±12.5 175 108
±25 175 108

Information Z Slide Module

Z Slide Overview

Travel Lengths 100 - 1000mm

Fully Motorised Options Including Limit Switches

Rotating Support Tube Option

With DPRF Module

Standard Feedthrough Chamber Included

With 3 Radial Mini Ports, Tapped M4 and 1 Dedicated LN2 Cooling Port

Motor Speed

0-200mm 54 Sec (400,000 Steps)

1 Turn = 0.2mm

Worm and Wheel Ratio 10:1

Design Advantage

All Metal Re-Circulating Bearings


Z Parameters Actuation Method Specification
Resolution Manual 10µm
Resolution Motorised 0.5µm
Repeatability Manual 10µm
Repeatability Motorised 1µm
Maximum Speed Motorised 4 mm.s-1

Z Slide Module

Z Travel mm A1 Dimension mm C Dimension mm
100 185 - 285 374
200 188 - 388 477
300 188 - 488 577
400 188 - 588 677
500 210 - 710 799
600 231 - 831 920
800 273 - 1073 1164
1000 319 - 1319 1408

Omniax Accessories

Additional modules include rotary drives, sample holders, differentially pumped rotary feedthroughs, sample heating, liquid nitrogen cooling, stepper motor controllers and support stands:

Rotary Drives

Rotary Drives

UHV Rotary Drives play a pivotal role in analytical instruments, precisely positioning samples for accurate readings and analyses.

Sample Holder

Sample Holders

Sample holders are the interface between the sample and the movements of the manipulator. Let's explore what VACGEN have to offer.

Sample Heating

Sample Heating

Resistive and Electron Beam Heater Modules can be fitted to the sample holders to provide sample heating up to 1200°C.

Liquid Nitrogen Cooling

Liquid Nitrogen Cooling

Liquid Nitrogen Cooling can be configured to the manipulator providing cooling of the sample down to temperatures of -165°C.

Motor Controller


Stepper motor controllers are available to power and control all motorised instrumentation for X,Y, Z and R1, R2 and R3 axes. These can be configured up to 99 axes in open/closed loop.


DPRFs & Rotary Platforms

Differentially Pumped Rotary Feedthroughs (DPRF) and Rotary Platforms can be fitted to the manipulator to provide additional means of rotation into the chamber.

Support Stand

Support Stands

Larger manipulators require support stands to stabilise the manipulator when mounted in a horizontal orientation, we provide 3 standard variations.

IMG_0476 (2)

Analysis Chamber

Our vast portfolio of bespoke chamber and system projects, gives us a wealth of knowledge and experience for one-off chamber builds.

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