Omniax UHV Sample Manipulator
The Omniax is a fully UHV compatible dual bellows manipulator with large probe capacity. The design utilises the unique VACGEN hinged knee assembly and guided support tube to eliminate sample deflection due to vacuum loading, providing extreme stability. The rigidity of the design makes it ideal for long travel lengths, multiple rotations, specimen security and capacity for feedthroughs.
The dual bellows manipulator is fully modular in design and can be built up to accommodate many different applications ranging from material analysis to complex deposition processes. After selecting the X,Y,Z carcass, additional methods of rotation can be added in the form of rotary drives and DPRFs, and sample holder modules with heating and cooling can be selected to create the ultimate manipulator for your application.
Key Features
Optional Base Flange Sizes
152mm OD CF Flange Tapped Holes or 203mm OD CF Flange Clear Holes
±25mm X and Y Axes
Instruments Up To 50mm OD with Full XY Travel
Z Travel Lengths
100mm to 1000mm Travel
High Load Capacity
20Kg Payload Horizontal or Vertical Orientation
Motorisation Options
All Axes Can Be Fully Motorised
Liquid Nitrogen Cooling
Optional Module
Mounting Orientation
Horizontal, Vertical & Inverted
Support Stands Available
Required for Horizontal Mounting
Designed for Primary & Azimuthal Rotary Drives
Supports All Standard Sample Holder Configurations
Standard Feedthrough Chamber
Dedicated Liquid Nitrogen Cooling Port Plus 3 Radial Feedthrough Ports
Extremely Robust Construction
Proprietary Design on Hinged Knee Assembly
Optional Support Tube Sizes
32mm (28mm Clear Bore) or 54mm (50mm Clear Bore)
Rotating Support Tube
Optional with DPRF Module
Fully Bakeable to 230°C
With Motors Removed
Design Eliminates Bi-Metal Deformation
Even After Repeated Bakeouts to 230°C
Operating Pressure
1 bar to 1x10-11 mbar
Leak Rate
1x10-10 mbar ls -1
Construction Advantages Include
All Metal Re-circulating Bearings for Z Axis & All Metal V Slides for X&Y Table
Information XY Table
XY Table Overview
±0mm, ±12.5mm or ±25mm Precision Movement
With 32mm or 54mm Support Tube
5µm Graduations on Micrometers
Optional Motor Upgrade
Stepper Motors, Encoded Stepper Motors and Limit Switches
Plugs Wired To Suit VACGEN Controllers
Motorised 1 Turn = 0.2mm
Ratio 5:1
Design Advantage
All Metal V Slides
| XY Parameters | Actuation Method | Specification |
|---|---|---|
| Resolution | Manual | 10µm |
| Resolution | Motorised | 0.5µm |
| Repeatability | Manual | 10µm |
| Repeatability | Motorised | 1µm |
| Maximum Speed | Motorised | 4 mm.s-1 |
XY Table
| XY Travel mm | A2 Dimension mm | Bellows Bore ⌀mm |
|---|---|---|
| ±0 | 80 | 95 |
| ±12.5 | 175 | 108 |
| ±25 | 175 | 108 |
Information Z Slide Module
Z Slide Overview
Travel Lengths 100 - 1000mm
Fully Motorised Options Including Limit Switches
Rotating Support Tube Option
With DPRF Module
Standard Feedthrough Chamber Included
With 3 Radial Mini Ports, Tapped M4 and 1 Dedicated LN2 Cooling Port
Motor Speed
0-200mm 54 Sec (400,000 Steps)
1 Turn = 0.2mm
Worm and Wheel Ratio 10:1
Design Advantage
All Metal Re-Circulating Bearings
| Z Parameters | Actuation Method | Specification |
|---|---|---|
| Resolution | Manual | 10µm |
| Resolution | Motorised | 0.5µm |
| Repeatability | Manual | 10µm |
| Repeatability | Motorised | 1µm |
| Maximum Speed | Motorised | 4 mm.s-1 |
Z Slide Module
| Z Travel mm | A1 Dimension mm | C Dimension mm |
|---|---|---|
| 100 | 185 - 285 | 374 |
| 200 | 188 - 388 | 477 |
| 300 | 188 - 488 | 577 |
| 400 | 188 - 588 | 677 |
| 500 | 210 - 710 | 799 |
| 600 | 231 - 831 | 920 |
| 800 | 273 - 1073 | 1164 |
| 1000 | 319 - 1319 | 1408 |
Omniax Accessories
Additional modules include rotary drives, sample holders, differentially pumped rotary feedthroughs, sample heating, liquid nitrogen cooling, stepper motor controllers and support stands:
Rotary Drives
UHV Rotary Drives play a pivotal role in analytical instruments, precisely positioning samples for accurate readings and analyses.
Sample Holders
Sample holders are the interface between the sample and the movements of the manipulator. Let's explore what VACGEN have to offer.
Sample Heating
Resistive and Electron Beam Heater Modules can be fitted to the sample holders to provide sample heating up to 1200°C.
Liquid Nitrogen Cooling
Liquid Nitrogen Cooling can be configured to the manipulator providing cooling of the sample down to temperatures of -165°C.
Motorisation
Stepper motor controllers are available to power and control all motorised instrumentation for X,Y, Z and R1, R2 and R3 axes. These can be configured up to 99 axes in open/closed loop.
DPRFs & Rotary Platforms
Differentially Pumped Rotary Feedthroughs (DPRF) and Rotary Platforms can be fitted to the manipulator to provide additional means of rotation into the chamber.
Support Stands
Larger manipulators require support stands to stabilise the manipulator when mounted in a horizontal orientation, we provide 3 standard variations.
Analysis Chamber
Our vast portfolio of bespoke chamber and system projects, gives us a wealth of knowledge and experience for one-off chamber builds.
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