Vacuum Chambers

Vacuum Chambers

Our vast portfolio of bespoke chamber and system projects, gives us a wealth of knowledge and experience for one-off chamber builds. We can offer a dedicated team to assist you in the design and production of your custom chamber requirements, offering complex geometry chambers with tight focal points and tolerances.


Advanced Technology, Tailored

Due to our vast portfolio of custom vacuum projects, you can trust our dedicated team to assist in the design and production of even the most bespoke chamber requirements. We have the capability to supply ultra-high vacuum chambers of any complexity, in a range of materials - including stainless steel, mu-metal, aluminium, aluminium alloys and nickel-based superalloys.

No matter how unique the project, our pioneering in-house quality and testing processes ensure reliable, high-calibre manufacture of every product – with test reports available on request.

Why Choose VACGEN as your vacuum chamber supply?

With over 50 years industry experience, our core competence is in the expert design, engineering, manufacture and clean-room assembly of chambers and manipulation subsystems, offering a wide portfolio of high and ultra-high vacuum chambers for multiple applications in the vacuum industry. From the manufacture of the first UHV valve to some of the most advanced vacuum research systems built, our long spanning history has given us an incredible grounding in the needs of our customers and how we can support new projects through the design phase, product delivery and installation, and ongoing support. Serving pioneering sectors such as the semiconductorenergymedical, and defence industries, we are experts in the design and build of ultra-high vacuum chambers used in applications such as:

Semiconductor Process Chambers (ALD, PVD, ETCH)

Surface Analysis Chambers (XPS, ARPES)

Surface Deposition Chambers (MBE, PLD)

Preparation Chambers

Radial Distribution Chambers

Transfer Chambers

Load Locks and more

Kick-Start Your Project with Expert Guidance

Our knowledgeable team will help you hit the ground running, even from the initial concept stages. We offer comprehensive support during every stage of the purchasing process, helping you to design a chamber that not only meets your application requirements, but has been underpinned by specialist advice regarding its specification.

A 3D CAD model of your chamber can be produced to aid the visualisation of the end product, while a Design for Manufacture service is available for existing designs or conceptual drawings, helping you to ensure an efficient, accurate and cost-effective build.

Need A Build-To-Print Solution? We Adhere to Copy Exactly! Techniques


If you already have a design for your chamber, our “build to print” service will supply the form and function you need, using high-quality Copy Exactly! processes.

The Copy Exact technique ensures that aesthetics, material composition and other essential factors will remain consistent with every single product, no matter where it is manufactured – guaranteeing supply chain trust and continuity.

Cleanroom-Ready Manufacturing


VACGEN have the capabilities required to help you create research, test and manufacturing conditions that are unique, robust, and free of molecular contaminants.

Our vacuum chambers are manufactured in cleanroom-ready environments, precisely and specifically cleaned according to the SEMI requirements. Our in-house cleaning processes and leak check certification ensures the very best vacuum performance which is guaranteed to be contamination-free and leak tight.

Complete Assembly Solutions

As well as bespoke UHV chamber design, we also offer a configurable range of chambers, comprised of standard skeletons. Our standardised configurable chambers carry a much shorter lead time, which can be as low as 6 weeks. You will still benefit from our expert manufacturing capabilities, which include:

  • 5 axis CNC Milling

  • Turning and Boring

  • Tapping and Threading

  • Rolling, Milling, Drilling and Reaming

Comprehensive Project Management


Throughout our partnership, experienced technical staff are on hand to manage your chamber project through manufacture, providing information and support, ensuring that the project’s build targets are met. As a result, VACGEN provide unrivalled value for money by supplying fabrications that fulfil your requirements first time, every time.

If you are looking for a chamber manufacturer who can fulfil your order, then contact us today for a quotation.

Organisations who trust VACGEN technology

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