Semiconductor Chambers

Customised High and Ultra-High Vacuum Chambers Systems for the Semiconductor Industry

Vacuum chambers are used to create the ultra-high vacuum necessary for certain Semiconductor manufacturing processes.

VACGEN are a key supplier to the Semiconductor industry, supporting the world’s leading Semiconductor equipment manufacturers in applications including ALD, CVD, Etch, E-beam and Lithography.

Need a build-to-print solution? We adhere to Copy Exactly! techniques

At VACGEN, we have the capabilities to design and manufacture custom vacuum chambers to meet our customer’s specific requirements. We also offer a “build to print” service for those customers who already have a design. Our vacuum chambers are fabricated from high-quality materials and are built to stringent SEMI standards, ensuring that they will meet the requirements of even the most demanding and specific applications.

Vacuum chambers manufactured for cleanroom ready environment

We supply vacuum system designs and products that are precisely and specifically cleaned according to the SEMI requirements. Our in-house cleaning processes and leak check certification ensures the very best vacuum performance and a contamination free environment.

Securing your equipment production line in times of high demand


Setting up manufacturing flow lines is an essential step to ensure 100% quality and on time delivery. VACGEN work with our customers and raw material supply chain to set up material supply agreements, blanket orders and forecasts locking future supply for extended periods.

Why Choose VACGEN as your vacuum chamber supply partner?

With over 50 years industry experience, our core competence is in the expert design, engineering, manufacture and clean-room assembly of chambers and manipulation subsystems, offering a wide portfolio of high and ultra-high vacuum chambers for multiple applications in the semiconductor industry. From the manufacture of the first UHV valve to some of the most advanced vacuum research systems built, our long spanning history has given us an incredible grounding in the needs of our customers and how we can support new projects through the design phase, product delivery and installation, and ongoing support.


We are a trusted supplier of vacuum companies big and small and would love to be at the heart of your supply chain.

State of the art
State of the art production line

Our production facility is a purpose built state-of-the-art building, designed around machining centres and flow lines for volume production capacity.

Everything under one roof

From 5-axis complex geometrical chambers with post-welding operations to ultra high vacuum cleaning techniques, we have everything under one roof.

Experts in UHV
Experts in UHV

Ultra-high vacuum product design and manufacture has been a central part of our business for over 50 years and we have the skills and knowledge to undertake your UHV project.

Organisations who trust VACGEN technology

Start your journey
with VACGEN today