TR Hollow Linear Transfer
Z-Axis Long Stroke Linear Transfer Mechanism
UHV Linear Transfer Mechanisms (LTM) are designed for single axis movement, to allow insertion of a probe or plasma diagnostic equipment into the vacuum chamber with a high degree of accuracy. The TR series are a long stroke Z-axis bellows sealed linear transfer mechanism, and mounted on 70mm OD CF flanges with a 33mm clear bore. The TR series can be fully motorised including stepper motors, encoded stepper motors and additional accessories.
Key Features
Linear Transfer
Travel Ranges 150-600mm
33mm OD Clear Bore
Edge-Welded Bellows
70mm OD Flange Mounting Flanges
Concentricity of flanges within 0.5mm
Resolution 10µm Manual
5µm Motorised
Manual Version Fully Bakeable to 230°C
No Need To Dismantle Any Part of the Drive
Graduated Scale
1mm Incremental Scale on Handwheel
High Load Capacity
Axial Load 200N
Fully Motorised Options
Stepper Motors and Encoded Stepper Motors
Information Table TR
Schematics
Accessories
Description
Order Code
Feedthrough Chamber with 3 mini ports
ZTRFC
Support Tube
ZTRST
Support Tube Bearing
ZTRRB
Support Stand for Horizontal Mounting
ZTRS
Worm Drive Kit
ZTRWD
Encoded Stepper Motor Kit for Retrofitting
ZTRSMKE
Stepper Motor Kit for Retrofitting
ZTRSMKW
DC Motor Kit for Retrofitting
ZTRDCMK1
Manual
Flange OD mm
Travel mm
Actuation
A Extended mm
A Compressed mm
B mm
Order Code
70
150
Manual
279
129
314
ZTR1570
70
300
Manual
466
166
499
ZTR3070
70
450
Manual
652
202
685
ZTR4570
70
600
Manual
815
215
849
ZTR6070
Stepper Motor
Flange OD mm
Travel mm
Actuation
A Extended mm
A Compressed mm
B mm
Order Code
70
150
Stepper Motor
279
129
314
ZTR1570W
70
300
Stepper Motor
466
166
499
ZTR3070W
70
450
Stepper Motor
652
202
685
ZTR4570W
70
600
Stepper Motor
815
215
849
ZTR6070W
Stepper Motor with Encoders
Flange OD mm
Travel mm
Actuation
A Extended mm
A Compressed mm
B mm
Order Code
70
150
Stepper Motor with Encoder
279
129
314
ZTR1570E
70
300
Stepper Motor with Encoder
466
166
499
ZTR3070E
70
450
Stepper Motor with Encoder
652
202
685
ZTR4570E
70
600
Stepper Motor with Encoder
815
215
849
ZTR6070E