XY Modules for Sample Manipulation

Ultra High Vacuum XY Movement

XY modules form the basis of complex sample manipulators, allowing the user to move in the X & Y planes. These stages can also be utilised as stand alone components for aligning instruments with extremely high precision. When ordering an XY module, a drive must be selected for both axis to provide ±12.5 or ±25mm travel. Stepper motor upgrades are available for both axes.

Key Features

XY Module with Up To ±25mm Travel

±0, ±12.5 or ±25mm Options

Fully Bakeable to 230°C

True UHV Compatible

Cross Roller Bearings

High Load Capacity & Precise Operation

Double Bolt Holes on Base Flange

For Easy System Mounting

Motorisation Available

Stepper Motors, Encoded Stepper Motors & Limit Switches

High Precision Micrometers

5µm Mitutoyo® Micrometers

When Ordering XY Module

Please Select a Drive For Each Axis

Leak Rate

1x10^-10 mbar ls ^-1

Information Table

Schematics

module breakup wide bore xy slide highlight-01

XY Modules

Base Flange	Top Flange	Travel Range	A2 mm	Bellows Bore mm	Probe Size mm	Order Code
DN150 (152mm)	DN100 (114mm)	±12.5mm to ±25mm	175	108	58	MT211B6
DN200 (203mm)	DN100 (114mm)	±12.5mm to ±25mm	175	108	58	MT211B8
DN150 (152mm)	DN65 (70mm)	±12.5mm to ±25mm	167	85	35	MT208A6

XY Modules - Widebore

Base Flange	Top Flange	Travel Range	A2 mm	Bellows Bore mm	Probe Size mm	Order Code
DN150 (152mm)	DN150 (150mm)	±12.5mm to ±25mm	175	108	58	MMWT256E
DN200 (203mm)	DN150 (150mm)	±12.5mm to ±25mm	175	108	58	MMWT258E

XY Modules are designed to be accommodate ±0, ±12.5 or ±25mm Micrometers as the drive option. These can be fully motorised with stepper motors, encoded stepper motors and limit switches. When ordering you must select a drive option for each axis, X & Y. If a motor is supplied, then these will be wired to suit VACGEN SIMSTEP control units. A separate mating plug is available upon request.

Not the right product?

Go back to the product selection guide or choose another related product

Primary & Azimuthal

Rotary Drives

When combined with a sample manipulator, rotary drives are designed to accommodate primary and secondary (azimuthal) rotation of the sample holder. These rotary motions allow the sample to be manipulated into position to face an analyser, deposition source or other instrumentation within the vacuum chamber.

Vacuum Rotation

Rotary Platforms & DPRF

Differentially pumped rotary feedthroughs are available in coarse, manual high precision and motorised high precision options. Mounted on 70mm, 114mm and 152mm OD base flanges, we offer a DPRF to suit each of our sample manipulators. These can be fully motorised with stepper motors, encoded motors or limit switches.