HPT UHV Sample Manipulator

Ultra High Vacuum Manipulator

The HPT is a high precision customisable sample manipulator, designed on a compact footprint. Situated on a 152mm OD CF base flange, the design offers space for up to 4 feedthroughs and liquid nitrogen cooling options. The wide bore of the HPT allows probe diameters up to 19mm OD with full vectoral movement ±12.5mm and owing to the design all axes can be fully motorised. A precision tilt adaptor is also available on request, offering the user flexibility in the modular components.

Key Features

152mm OD CF Base Flange Size

4 Feedthrough Mini Ports for Services

±12.5mm X and Y Axes

Bellows Clear Bore 44mm

Z Travel Lengths

50mm to 250mm Travel

All Axes Can Be Motorised

Including X,Y, Z, R1 & R2

XY Stage Uses All Metal Roller Bearing

V Slides

Mounting Orientation

Horizontal, Vertical & Inverted

Fully Bakeable to 230°C

Including Micrometers

Precision Tilt Available

7° Incline to Primary Axis

Re-circulating All Metal Ball Guides on Z Slide

Vacuum Compression Spring to Increase Z Slide Lifespan

Liquid Nitrogen Cooling

Optional add on

Operating Pressure

1 bar to 1x10-11 mbar

Leak Rate

1x10-10 mbar ls -1

Information HPT

Schematic

XY Parameters

XY Parameters Actuation Method Specification
Resolution Manual 5µm
Repeatability Manual 5µm
Repeatability Motorised 2.5µm
Repeatability Motorised 2.5µm

Z Parameters

XY Parameters Actuation Method Specification
Resolution Manual 5µm
Repeatability Manual 10µm
Resolution Motorised 2.5µm
Repeatability Motorised 5µm
Z Travel mm A mm C mm
50 210 - 260 294
100 210 - 310 344
150 275 - 425 459
250 226 - 476 510

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