Miniax UHV Sample Manipulator
The Miniax is a simple XYZ manipulator, ideal for sample storage and basic sample handling. The all-metal cross roller bearings provide smooth operation in the XY axes and allow for up to 200°C bakeout temperatures. The compact manual design makes it easy to fit in any orientation, whilst taking up limited system space. Situated either on a 70mm OD CF base flange, or 152mm OD CF base flange if service ports are required. The 152mm version accommodates 4 feedthrough ports, perfect for configuring to your system requirements.
Key Features
Optional Base Flange Sizes
70mm OD CF Flange or 152mm OD CF Flange
±12.5mm X and Y Axes
Instruments Up To 19mm OD
Z Travel Lengths
50mm to 100mm Travel
Mounting Orientation
Horizontal, Vertical & Inverted
Construction Advantages Include
All Metal Cross Roller Bearings for XY Movement
152mm Base Flange with 4 mini Feedthrough Ports
Provides LN2 and Feedthrough Options
Travelling Flange
70mm OD with Straddled M6 Tapped Holes
Fully Bakeable to 200°C
Including Micrometers
Operating Pressure
1 bar to 1x10-11 mbar
Leak Rate
1x10-10 mbar ls -1
Information Miniax
XY Table Overview
XYZ Parameters
XY Parameters
XY Parameters | Actuation Method | Specification |
---|---|---|
Resolution | Manual | 10µm |
Repeatability | Manual | 5µm |
Z Parameters
Z Parameters | Actuation Method | Specification |
---|---|---|
Resolution | Manual | 5µm |
Repeatability | Manual | 10µm |
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