Triax UHV Sample Manipulator
The Triax multi-axes sample manipulator is used for positioning a sample under ultra-high vacuum (UHV) conditions. The XYZ manipulator when combined with a sample holder and rotary drive allows precise positioning within the chamber. The wide bore allows 19mm OD instruments to have full vectoral travel and owing to the design, all axes can be fully motorised with digital read out available. The universal orientation and small footprint allows for the end-user to make better use of the air-side chamber space.
Key Features
Optional Base Flange Sizes
114mm or 152mm OD CF Flange
±12.5mm X and Y Axes
Fully Motorisable
40mm Clear Bore
Instruments up to 19mm with Full Travel
Z Travel Lengths
50mm to 600mm Travel
Universal Mounting Orientation
Horizontal, Vertical & Inverted
Fully Bakeable to 200°C
Including Micrometers
Fully Motorisable Axes
Including X, Y, Z, R1 & R2
NEMA17 Compact Motors
Digital Read Out Version Available
Operating Pressure
1 bar to 1x10-11 mbar
Leak Rate
1x10-10 mbar ls -1
Information Triax
Schematics
XYZ Parameters
XYZ Parameters | Actuation Method | Specification |
---|---|---|
Resolution | Manual | 10µm |
Repeatability | Manual | 10µm |
Repeatability | Motorised | 1µm |
Repeatability | Motorised | 1µm |
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