| Technical Data for Viewport Shutter | |
| Shutter | Stainless steel |
| Mounting seal | OFHC gasket (Both side) |
| Operate pressure range | 760 Torr - 1x10-10 Torr, 1,000 mbar - 1.33x10-10 mbar, 100 kPa - 1.13x10-9 kPa |
| Leak rate | 1 x 10-10 Torr l/s, He,1.33x10-10 mbar l/s, He,1.13x10-9 kPa |
| Operational Temperature Range | 0°C - 200°C |
| Bake Temperature | 250°C |
| Body material | 304L |
| Feedthrough | UHV Rotary Drive |
| Mounting position | Any |
| Viewport Shutter | ||||
| DN | Length mm (A) | Flange OD mm (B) | Flange OD inch | Order Code and Step File |
| DN63 | 197 | 114 | 4.50 | ZVPS63 |
| DN100 | 235 | 152 | 6.00 | ZVPS100 |
| DN150 | 285 | 202 | 8.00 | ZVPS150 |
Features
- UHV rotary drive with intergrated stop position
- Formed internal shield to allow maximum viewing angle and internal surface protection
- Easy installation mounted beneath standard VACGEN viewport