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Viewport Shutter £0.00
Quick Overview Viewport shutters are used to protect the internal surface of a viewport from build-up of deposition material ejected during thin film processing of substrates. The shutter design is built to allow the widest possible viewing angle, and the maximum level of protection of the viewing area.
Technical Data for Viewport Shutter Shutter Stainless steel Mounting seal OFHC gasket (Both side) Operate pressure range 760 Torr - 1x10-10 Torr, 1,000 mbar - 1.33x10-10 mbar, 100 kPa - 1.13x10-9 kPa Leak rate 1 x 10-10 Torr l/s, He,1.33x10-10 mbar l/s, He,1.13x10-9 kPa Operational Temperature Range 0°C - 200°C Bake Temperature 250°C Body material 304L Feedthrough UHV Rotary Drive Mounting position Any
Viewport Shutter DN Length mm (A) Flange OD mm (B) Flange OD inch Order Code and Step File DN63 197 114 4.50 ZVPS63 DN100 235 152 6.00 ZVPS100 DN150 285 202 8.00 ZVPS150
Features UHV rotary drive with intergrated stop position Formed internal shield to allow maximum viewing angle and internal surface protection Easy installation mounted beneath standard VACGEN viewport