Viewport Shutter

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ZVPS
Viewport Shutter

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Technical Data for Viewport Shutter
ShutterStainless steel
Mounting sealOFHC gasket (Both side)
Operate pressure range760 Torr - 1x10-10 Torr, 1,000 mbar - 1.33x10-10 mbar, 100 kPa - 1.13x10-9 kPa
Leak rate1 x 10-10 Torr l/s, He,1.33x10-10 mbar l/s, He,1.13x10-9 kPa
 Operational Temperature Range0°C - 200°C
Bake Temperature250°C
Body material304L
FeedthroughUHV Rotary Drive
Mounting positionAny
Viewport Shutter
DNLength mm (A)Flange OD mm (B)Flange OD inchOrder Code and Step File
DN631971144.50ZVPS63
DN1002351526.00ZVPS100
DN1502852028.00ZVPS150
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