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Technical Data for Viewport Shutter | |
Shutter | Stainless steel |
Mounting seal | OFHC gasket (Both side) |
Operate pressure range | 760 Torr - 1x10-10 Torr, 1,000 mbar - 1.33x10-10 mbar, 100 kPa - 1.13x10-9 kPa |
Leak rate | 1 x 10-10 Torr l/s, He,1.33x10-10 mbar l/s, He,1.13x10-9 kPa |
Operational Temperature Range | 0°C - 200°C |
Bake Temperature | 250°C |
Body material | 304L |
Feedthrough | UHV Rotary Drive |
Mounting position | Any |
Viewport Shutter | ||||
DN | Length mm (A) | Flange OD mm (B) | Flange OD inch | Order Code and Step File |
DN63 | 197 | 114 | 4.50 | ZVPS63 |
DN100 | 235 | 152 | 6.00 | ZVPS100 |
DN150 | 285 | 202 | 8.00 | ZVPS150 |
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