Ultra-High Vacuum Valves (UHV)

VACGEN Vacuum valves are compact valves used to isolate or control the pressure within a UHV vacuum system

VACGEN supply a comprehensive range of ultra-high vacuum (UHV) valves, from all-metal right hand angles for true UHV applications, to ultra-fine controllable leak valves which have been designed for fine pressure control with extremely low hystoresis.

UHV Leak Valves

UHV Right Angle Valves

Valve Accessories

Our range of UHV leak valves are used for precise control of the flow of gas into a vacuum system from an external source. They are of all metal construction and, due to their ultra-fine control actuator and low internal volume, are extreme repeatable - offering excellent response over a wide and dynamic pressure range. UHV right angle valves come in two standard types, the CR and CRD. These valves offer a good conductance and, owing to their all-metal construction, have a high bake-out temperature 300°c when the valves are closed. The CR range have a fully welded bonnet which offers enhanced performance when the valve is shut off, due to no internal stress on the bonnet joint and gasket. The CRD range have a demountable bonnet which is designed primarily for customers who have a fixed manifold. Our range of UHV valves come with a range of spares for repairs in the field. These service kits can be used in conjunction with the assembly guides, YouTube videos and manuals for easy maintenance, keeping your valves running in top condition for years of service.
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  1. All Metal Manual Right Angle Valve - Rotatable DN19CF
    SKU: ZCR20R
    4 to 6 weeks delivery
    £557.74
    Right angle all metal valve, offering excellent conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.
  2. All Metal Manual Right Angle Demountable Valve - 2 x Rotatable DN19CF
    SKU: ZCRD20R
    £1,100.00
    Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.
  3. All Metal Manual Right Angle Valve - 2 x Rotatable DN41CF
    SKU: ZCR40R
    4 to 6 weeks delivery
    £764.60
    Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.
  4. All Metal Manual Right Angle Valve Demountable - 2 x Rotatable DN41CF
    SKU: ZCRD40R
    £755.42
    Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.
  5. All Metal Manual Right Angle Valve - 2 x Rotatable DN41CF - 316L Body & Flanges
    SKU: ZCR40RL
    4 to 6 weeks delivery
    £1,800.00
    Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.
  6. All Metal Manual Right Angle Valve - 2 x Rotatable DN64CF
    SKU: ZCR60R
    £1,438.48
    Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.
  7. All Metal Manual Right Angle Valve Demountable- 2 x Rotatable DN64CF
    SKU: ZCRD60R
    4 to 6 weeks delivery
    £0.00
    Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.
  8. All Metal Right Angled Leak Valve Manual - 2 x Rotatable DN19CF
    SKU: ZLVM940R
    £889.66
    All metal Leak Valves with Mallory® sealing pad which offers a superior seal compared to a sapphire seat which can crack causing system vacuum failure. These are recommended for repeatable precise control the flow of gas and these are the preferred choice for system builders who need a reliable cost effective ultra-fine gas inlet control. For service and calibration please see product videos or visit https://vacgen.com/operating-instructions
  9. All Metal Right Angled Leak Valve - 2 x Rotatable DN38CF
    SKU: ZLVM263R
    4 to 6 weeks delivery
    £1,357.35
    All metal Leak Valves with Mallory® sealing pad which offers a superior seal compared to a sapphire seat which can crack causing system vacuum failure. These are recommended for repeatable precise control the flow of gas and these are the preferred choice for system builders who need a reliable cost effective ultra-fine gas inlet control.
  10. All Metal Right Angled Leak Valve Manual - 1 x Fixed 1 x Tapped DN19CF
    SKU: ZMD95
    £1,424.33
    All metal miniature leak valve with nickel sealing disc. These are used for course control flow of gas into a vacuum system from an external source and operates to 1x10-9 mbar pressure range.
  11. All Metal Body Right Angled Viton® Sealed Valve - 2 x Rotatable DN41
    SKU: ZVR40R
    £658.97
    The VR valves are right angled general purpose UHV valves with a cycle usage minimum of 100,000 activations. The bonnet (top) seal of the valve is welded on the VR series.
  12. All Metal Body Right Angled Viton® Sealed Valve - 2 x Rotatable DN64C
    SKU: ZVR60R
    4 to 6 weeks delivery
    £0.00
    The VR valves are right angled general purpose UHV valves with a cycle usage minimum of 100,000 activations. The bonnet (top) seal of the valve is welded on the VR series.
  13. ZCR40 Valve Replacement Pad Annealed Copper
    SKU: ZCR40C
    £150.32
    Spares for all metal valves
  14. ZCR20 Valve Replacement Pad Annealed Copper
    SKU: ZCR20C
    £165.25
    Spares for all metal valves
  15. ZLVM Leak Valve Replacement Control Arm Assembly
    SKU: ZLVMARMKT
    £193.95
    Spares for all metal valves
  16. ZLVM Leak Valve Replacement Diaphragm Service Kit
    SKU: ZLVMDSK
    £450.20
    Spares for all metal valves
  17. ZLVM Leak Valve Replacement Pad Service Kit
    SKU: ZLVMPSK
    £225.07
    Spares for all metal valves
  18. ZVR40 Valve O Ring Seal Kit
    SKU: ZVR40VS
    4 to 6 weeks delivery
    £3.42
    Spares for all metal valves
  19. ZVR60 Valve O Ring Seal Kit
    SKU: ZVR60VS
    4 to 6 weeks delivery
    £4.73
    Spares for all metal valves
  20. Bellows Assembly GV50 - 50 Convolutions
    SKU: GV50BA
    4 to 6 weeks delivery
    £1,876.85
    Bellows Assembly
  21. Bellows Assembly GV28 - 30 Convolutions
    SKU: GV28BA
    4 to 6 weeks delivery
    £1,653.42
    Bellows Assembly
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