The photomask is a critical part of the semiconductor fabrication process and inspection processes often involve sophisticated electromechanical assemblies to achieve high precision and reliability. Some of the key electromechanical assemblies commonly used in reticle inspection systems are XYZ stages, robotic arms, inspection and alignment equipment. In this blog we’ll take a look at various semiconductor inspection tools and their uses in the wafer inspection process.
Metrology plays a crucial role in the semiconductor industry by providing measurement and inspection solutions to ensure the quality, accuracy, and reliability of semiconductor devices. Various metrology equipment is utilised throughout the semiconductor manufacturing process, with many of the processes requiring a vacuum environment to perform affectively.
