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All metal Leak Valves with Mallory® sealing pad which offers a superior seal compared to a sapphire seat which can crack causing system vacuum failure. These are recommended for repeatable precise control the flow of gas and these are the preferred choice for system builders who need a reliable cost effective ultra-fine gas inlet control.

All metal miniature leak valve with nickel sealing disc. These are used for course control flow of gas into a vacuum system from an external source and operates to 1x10-9 mbar pressure range.

Spares for all metal valves

Spares for all metal valves

Spares for all metal valves

All metal Leak Valves with Mallory® sealing pad which offers a superior seal compared to a sapphire seat which can crack causing system vacuum failure. These are recommended for repeatable precise control the flow of gas and these are the preferred choice for system builders who need a reliable cost effective ultra-fine gas inlet control. For service and calibration please see product videos or visit https://vacgen.com/operating-instructions

Liquid feedthroughs are used to transfer fluids or gases through a Conflat flange into, or out of, a vacuum system. The LFT feedthroughs comprise of stainless steel tubes, terminating in a UHV leak tight connection on the vacuum side, using a copper gasket. The mating part of the connector is supplied, so you can weld you existing pipe work this, to make a UHV leak tight connection.

Liquid feedthroughs are used to transfer fluids or gases through a Conflat flange into, or out of, a vacuum system. The LFT feedthroughs comprise of stainless steel tubes, terminating in a UHV leak tight connection on the vacuum side, using a copper gasket. The mating part of the connector is supplied, so you can weld you existing pipe work this, to make a UHV leak tight connection.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Calcium fluoride viewports are offered in CF flange styles. The UHV CF versions are offered using 304L stainless steel flanges.

IGC5 is an Ion gauge which combines the functionality of several vacuum system controllers into a single easy to use unit, reducing hardware, wiring and cost. The IGC5 combines the latest microprocessor technology in a 19" 1U rack mount unit, which is very stability and reliability. The IGC5 also offers Bake Out and Pirani Gauge option as standard.

IGC5 is an Ion gauge which combines the functionality of several vacuum system controllers into a single easy to use unit, reducing hardware, wiring and cost. The IGC5 combines the latest microprocessor technology in a 19" 1U rack mount unit, which is very stability and reliability. The IGC5 also offers Bake Out and Pirani Gauge option as standard.

IGC5 is an Ion gauge which combines the functionality of several vacuum system controllers into a single easy to use unit, reducing hardware, wiring and cost. The IGC5 combines the latest microprocessor technology in a 19" 1U rack mount unit, which is very stability and reliability. The IGC5 also offers Bake Out and Pirani Gauge option as standard.

IGC5 is an Ion gauge which combines the functionality of several vacuum system controllers into a single easy to use unit, reducing hardware, wiring and cost. The IGC5 combines the latest microprocessor technology in a 19" 1U rack mount unit, which is very stability and reliability. The IGC5 also offers Bake Out and Pirani Gauge option as standard.

IGC5 is an Ion gauge which combines the functionality of several vacuum system controllers into a single easy to use unit, reducing hardware, wiring and cost. The IGC5 combines the latest microprocessor technology in a 19" 1U rack mount unit, which is very stability and reliability. The IGC5 also offers Bake Out and Pirani Gauge option as standard.

IGC5 is an Ion gauge which combines the functionality of several vacuum system controllers into a single easy to use unit, reducing hardware, wiring and cost. The IGC5 combines the latest microprocessor technology in a 19" 1U rack mount unit, which is very stability and reliability. The IGC5 also offers Bake Out and Pirani Gauge option as standard.

IGC5 is an Ion gauge which combines the functionality of several vacuum system controllers into a single easy to use unit, reducing hardware, wiring and cost. The IGC5 combines the latest microprocessor technology in a 19" 1U rack mount unit, which is very stability and reliability. The IGC5 also offers Bake Out and Pirani Gauge option as standard.

IGC5 is an Ion gauge which combines the functionality of several vacuum system controllers into a single easy to use unit, reducing hardware, wiring and cost. The IGC5 combines the latest microprocessor technology in a 19" 1U rack mount unit, which is very stability and reliability. The IGC5 also offers Bake Out and Pirani Gauge option as standard. Use from < Serial # 008800.

The Titanium Sublimation Pump is a true UHV pump. It is used to supplement the pumping action of other UHV pumps, (normally Ion Pumps) as it can be more effective at pumping certain gases. The main advantages of this type of pump is, it is a simple, low cost solution, that gives you high pumping speeds.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Ultra stable modular 54mm bore dual bellows manipulator for vertical or horizontal mount. Modular XYZ manipulator with NW63CF(114mm OD) conflat flange travelling. 54mm clear bore. Z travel 100mm to 1000mm; ±25 mm XY travel. Manual and motorisation options.

Modular XYZ Omniax with NW100CF (152mm OD) conflate flange travelling. 100mm clear bore. Z travel 100mm to 1000mm; ±25 mm XY travel. Manual and motorisation options.

The VR valves are right angled general purpose UHV valves with a cycle usage minimum of 100,000 activations. The bonnet (top) seal of the valve is welded on the VR series.

The VR valves are right angled general purpose UHV valves with a cycle usage minimum of 100,000 activations. The bonnet (top) seal of the valve is welded on the VR series.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

The MRD93 is a manual drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive.

Viewport shutters are used to protect the internal surface of a viewport from build-up of deposition material ejected during thin film processing of substrates. The shutter design is built to allow the widest possible viewing angle, and the maximum level of protection of the viewing area.

The MRD91 is a manual or motorised magnetic rotary drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive. The MRD91 is fitted with Index scale and position lock.

The MRD6 is a manual or motorised magnetic rotary drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive. The MRD6 is fitted with Index scale and position lock.

The MRD91 is a manual or motorised magnetic rotary drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive. The MRD91 is fitted with Index scale and position lock.

The MRD6 is a manual or motorised magnetic rotary drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive. The MRD6 is fitted with Index scale and position lock.

Right angle all metal valve, offering excellent conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.