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Spares for all metal valves

All metal Leak Valves with Mallory® sealing pad which offers a superior seal compared to a sapphire seat which can crack causing system vacuum failure. These are recommended for repeatable precise control the flow of gas and these are the preferred choice for system builders who need a reliable cost effective ultra-fine gas inlet control. For service and calibration please see product videos or visit https://vacgen.com/operating-instructions

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

All metal Leak Valves with Mallory® sealing pad which offers a superior seal compared to a sapphire seat which can crack causing system vacuum failure. These are recommended for repeatable precise control the flow of gas and these are the preferred choice for system builders who need a reliable cost effective ultra-fine gas inlet control.

Spares for all metal valves

Spares for all metal valves

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

Motor Controller will suit all the standard motorisation offer by VACGEN. This is a rack mounted 3U 1/3rd single axis controller with a robust long life design. This comes with a simple software package, which when purchased with a motorised component, will be a plug and play out of the box. The unit can be used in either open or closed loop (Encoder) configuration. We also offer a full range of cables and optional extras.

All metal miniature leak valve with nickel sealing disc. These are used for course control flow of gas into a vacuum system from an external source and operates to 1x10-9 mbar pressure range.

Spares for all metal valves

Spares for all metal valves

Liquid feedthroughs are used to transfer fluids or gases through a Conflat flange into, or out of, a vacuum system. The LFT feedthroughs comprise of stainless steel tubes, terminating in a UHV leak tight connection on the vacuum side, using a copper gasket. The mating part of the connector is supplied, so you can weld you existing pipe work this, to make a UHV leak tight connection.

Liquid feedthroughs are used to transfer fluids or gases through a Conflat flange into, or out of, a vacuum system. The LFT feedthroughs comprise of stainless steel tubes, terminating in a UHV leak tight connection on the vacuum side, using a copper gasket. The mating part of the connector is supplied, so you can weld you existing pipe work this, to make a UHV leak tight connection.

90° Radius elbows, on each axis, one of the flanges is fixed and the other is rotatable. The fixed flange comes in two versions of bolt hole orientation, inline or straddled configuration, enabling the connection in any orientation of the vacuum equipment.

90° Radius elbows, on each axis, one of the flanges is fixed and the other is rotatable. The fixed flange comes in two versions of bolt hole orientation, inline or straddled configuration, enabling the connection in any orientation of the vacuum equipment.

90° Radius elbows, on each axis, one of the flanges is fixed and the other is rotatable. The fixed flange comes in two versions of bolt hole orientation, inline or straddled configuration, enabling the connection in any orientation of the vacuum equipment.

90° Radius elbows, on each axis, one of the flanges is fixed and the other is rotatable. The fixed flange comes in two versions of bolt hole orientation, inline or straddled configuration, enabling the connection in any orientation of the vacuum equipment.

90° Radius elbows, on each axis, one of the flanges is fixed and the other is rotatable. The fixed flange comes in two versions of bolt hole orientation, inline or straddled configuration, enabling the connection in any orientation of the vacuum equipment.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

The standard SH2 dual axis sample mounting module has a relative magnetic permeability of

Ultra stable modular 54mm bore dual bellows manipulator for vertical or horizontal mount. Modular XYZ manipulator with NW63CF(114mm OD) conflat flange travelling. 54mm clear bore. Z travel 100mm to 1000mm; ±25 mm XY travel. Manual and motorisation options.

Modular XYZ Omniax with NW100CF (152mm OD) conflate flange travelling. 100mm clear bore. Z travel 100mm to 1000mm; ±25 mm XY travel. Manual and motorisation options.

The VR valves are right angled general purpose UHV valves with a cycle usage minimum of 100,000 activations. The bonnet (top) seal of the valve is welded on the VR series.

The VR valves are right angled general purpose UHV valves with a cycle usage minimum of 100,000 activations. The bonnet (top) seal of the valve is welded on the VR series.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

The standard SH1 sample mounting module has a relative magnetic permeability of

The MRD93 is a manual drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive.

Viewport shutters are used to protect the internal surface of a viewport from build-up of deposition material ejected during thin film processing of substrates. The shutter design is built to allow the widest possible viewing angle, and the maximum level of protection of the viewing area.

The MRD91 is a manual or motorised magnetic rotary drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive. The MRD91 is fitted with Index scale and position lock.

The MRD6 is a manual or motorised magnetic rotary drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive. The MRD6 is fitted with Index scale and position lock.

The MRD91 is a manual or motorised magnetic rotary drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive. The MRD91 is fitted with Index scale and position lock.

The MRD6 is a manual or motorised magnetic rotary drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive. The MRD6 is fitted with Index scale and position lock.

Right angle all metal valve, offering excellent conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

A zero length viewport has a thickness no larger than that of its mounting flange. This makes it easier to protect from accidental damage. It provides the best angle of view as there are no tubulation walls to restrict observation. Kodial viewports are offered in CF flange styles. The viewports comprise borosilicate glass optic which is sealed to a Kovar weld ring using an induction heater process. The optic assemblies are helium leak tested and cleaned for ultra high vacuum (UHV) conditions.

A zero length viewport has a thickness no larger than that of its mounting flange. This makes it easier to protect from accidental damage. It provides the best angle of view as there are no tubulation walls to restrict observation. Kodial viewports are offered in CF flange styles. The viewports comprise borosilicate glass optic which is sealed to a Kovar weld ring using an induction heater process. The optic assemblies are helium leak tested and cleaned for ultra high vacuum (UHV) conditions.

A zero length viewport has a thickness no larger than that of its mounting flange. This makes it easier to protect from accidental damage. It provides the best angle of view as there are no tubulation walls to restrict observation. Kodial viewports are offered in CF flange styles. The viewports comprise borosilicate glass optic which is sealed to a Kovar weld ring using an induction heater process. The optic assemblies are helium leak tested and cleaned for ultra high vacuum (UHV) conditions.

A zero length viewport has a thickness no larger than that of its mounting flange. This makes it easier to protect from accidental damage. It provides the best angle of view as there are no tubulation walls to restrict observation. Kodial viewports are offered in CF flange styles. The viewports comprise borosilicate glass optic which is sealed to a Kovar weld ring using an induction heater process. The optic assemblies are helium leak tested and cleaned for ultra high vacuum (UHV) conditions.

A zero length viewport has a thickness no larger than that of its mounting flange. This makes it easier to protect from accidental damage. It provides the best angle of view as there are no tubulation walls to restrict observation. Kodial viewports are offered in CF flange styles. The viewports comprise borosilicate glass optic which is sealed to a Kovar weld ring using an induction heater process. The optic assemblies are helium leak tested and cleaned for ultra high vacuum (UHV) conditions.