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Spares for all metal valves

All metal Leak Valves with Mallory® sealing pad which offers a superior seal compared to a sapphire seat which can crack causing system vacuum failure. These are recommended for repeatable precise control the flow of gas and these are the preferred choice for system builders who need a reliable cost effective ultra-fine gas inlet control. For service and calibration please see product videos or visit https://vacgen.com/operating-instructions

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

All metal Leak Valves with Mallory® sealing pad which offers a superior seal compared to a sapphire seat which can crack causing system vacuum failure. These are recommended for repeatable precise control the flow of gas and these are the preferred choice for system builders who need a reliable cost effective ultra-fine gas inlet control.

Spares for all metal valves

Spares for all metal valves

All metal miniature leak valve with nickel sealing disc. These are used for course control flow of gas into a vacuum system from an external source and operates to 1x10-9 mbar pressure range.

Spares for all metal valves

Spares for all metal valves

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering excellent conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Conductor: 1 x 5 mm dia stainless steel. Power feedthroughs are used to carry either high current, or high voltage, or both.

Instrumentation feedthroughs are used to carry electrical signals (Including Thermocouple) which are normally low current and/or voltage. These feedthroughs are available in multi pin versions on either 34mm or 70mm OD flanges. These also come with the option of a European voltage compliant connectors

Instrumentation feedthroughs are used to carry electrical signals (Including Thermocouple) which are normally low current and/or voltage. These feedthroughs are available in multi pin versions on either 34mm or 70mm OD flanges. These also come with the option of a European voltage compliant connectors

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

The VR valves are right angled general purpose UHV valves with a cycle usage minimum of 100,000 activations. The bonnet (top) seal of the valve is welded on the VR series.

The VR valves are right angled general purpose UHV valves with a cycle usage minimum of 100,000 activations. The bonnet (top) seal of the valve is welded on the VR series.

The MRD91 is a manual or motorised magnetic rotary drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive. The MRD91 is fitted with Index scale and position lock.

The MRD6 is a manual or motorised magnetic rotary drive which uses high strength Sm2Co17 magnetic coupling to transfer rotational forces into the vacuum envelope. This is achieved without any dynamic seals or bellows making these devices exceptionally robust and no risk of a vacuum leak for the life of the drive. The MRD6 is fitted with Index scale and position lock.

Bellows Assembly

Bellows Assembly

RD Spares

Spares for all metal valves

Spares for all metal valves

Drive Screw Assembly for LTM150

Drive Screw Assembly for LTM100

Drive Screw Assembly for LTM75

Drive Screw Assembly for LTM25

RD Spares

RD Spares

RD Spares

RD Spares

RD Spares

The RD6 is a manual or motorised precision rotary drive with a 100mm shaft length. The RD6 has low backlash, with a smooth continuous primary rotation via a 9.5 mm diameter shaft.

The RD91 is a manual or motorised precision rotary drive, with a 100mm shaft length. The RD91 is fitted with Index scale and position lock. The drive provides a low backlash, with a smooth continuous primary rotation via a 6.35mm diameter shaft.

Instrumentation feedthroughs are used to carry electrical signals (Including Thermocouple) which are normally low current and/or voltage. These feedthroughs are available in multi pin versions on either 34mm or 70mm OD flanges. These also come with the option of a European voltage compliant connectors

The RD6 is a manual or motorised precision rotary drive with a 100mm shaft length. The RD6 has low backlash, with a smooth continuous primary rotation via a 9.5 mm diameter shaft.

Instrumentation feedthroughs are used to carry electrical signals (Including Thermocouple) which are normally low current and/or voltage. These feedthroughs are available in multi pin versions on either 34mm or 70mm OD flanges. These also come with the option of a European voltage compliant connectors

Instrumentation feedthroughs are used to carry electrical signals (Including Thermocouple) which are normally low current and/or voltage. These feedthroughs are available in multi pin versions on either 34mm or 70mm OD flanges. These also come with the option of a European voltage compliant connectors

Instrumentation feedthroughs are used to carry electrical signals (Including Thermocouple) which are normally low current and/or voltage. These feedthroughs are available in multi pin versions on either 34mm or 70mm OD flanges. These also come with the option of a European voltage compliant connectors

Instrumentation feedthroughs are used to carry electrical signals (Including Thermocouple) which are normally low current and/or voltage. These feedthroughs are available in multi pin versions on either 34mm or 70mm OD flanges. These also come with the option of a European voltage compliant connectors

Instrumentation feedthroughs are used to carry electrical signals (Including Thermocouple) which are normally low current and/or voltage. These feedthroughs are available in multi pin versions on either 34mm or 70mm OD flanges. These also come with the option of a European voltage compliant connectors