Chambers
UHV Chamber Manufacturing
VACGEN has been manufacturing UHV vacuum systems for over 50 years. Our large state of the art production facility means we can now offer an even better service to our customers. Technology building blocks from VACGEN are used widely across the world's leading Universities and major research institutions, from NASA and the European Space Agency to the Large Hadron Collider at CERN.
Chamber Applications
Here at VACGEN we supply ultra high vacuum chambers manufactured to your specific requirements. You will be assigned a project engineer who will oversee your build from design, through engineering and completion, to delivery.
To begin this journey we will first discuss your UHV chamber application, they could be one of the following applications:
- Semiconductor
- Surface Analysis
- Preperation Chamber
- Radial Telescopic Transfer Arm (RTTA)
- Transfer Chamber
- Load Lock
Design for Manufacture
Due to our vast portfolio of bespoke system projects, we can offer you a dedicated team to assist you in the design and production of your custom chamber requirements. Our stringent UHV in-house manufacturing and testing processes ensure high quality production - test reports are available on request. VACGEN has the capability to supply ultra high vacuum chambers of any complexity in a range of materials including stainless steel and mu-metal. Other materials such as aluminum, aluminum alloys and nickel-based superalloys can be used where requirements demand. We offer comprehensive support during the purchasing process, helping the customer to design a chamber that meets their application requirements and providing specialist advice regarding the specification of the chamber. VACGEN offers the additional service of chamber design and port clash detection. A 3-Dimensional CAD model of your chamber can be produced to aid the visualisation of the end product.
If you have an existing design or a conceptual drawings, we can offer a DfM service to produce your vessel in an efficient, accurate and cost effective way. Due to our vast portfolio of bespoke system projects, we can offer you a dedicated team to assist you in the design and production of your custom chamber requirements.
Common Materials (Body & Tubes)
Stainless Steel 316L & 304L
Nickel Based Super Alloy
Alloy 6082-T6
Tolerances
Port Length, General ±1mm, Analyser Port Only ±0.5mm
Phi & Theta Angles ±0.5°
General Tolerance R2.0mm
UHV Cleaned
Leak Rate - 2x10-10 mbar ls-1
Maximum Chamber Size
(W) 700mm x (D) 700mm x (H) 1000mm
500kg maximum mass
Complete Assembly Solutions
We can offer two types of service for your UHV chamber design. First we offer a configurable range of chambers, comprised of standard skeletons or we can offer a bespoke design for manufacture. Standardised Configurable Chambers carry a much shorter lead time, which can be as low as 6 weeks. Our manufacturing capabilities include:
- 5 axis CNC Milling
- Turning and Boring
- Tapping and Threading
- 3D CAD and CAM
- Rolling, Milling, Drilling and Reaming
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Configurable UHV ChambersSKU: UHVCHAMCONFIGAvailable SoonA standardised range of configurable UHV chambers have been designed for your convenience. This configurable range of products, including skeletons, tubes, flanges and gaskets will make designing your chamber a simplistic task and will ensure the costs and lead time of your chamber design are kept within your time frames and your budget. Lead times can be as low as 7 weeks with the configurable range. -
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UHV Bell ChamberSKU: ZBELLAvailable SoonThe VACGEN Hemisphere Bell Chamber can be manufactured from metals such as the high permeability material Mu-Metal or Stainless Steel 316L and is suitable for applications such as Preperation or Surface Analysis. -
UHV Ball ChamberSKU: ZBALLAvailable SoonA standardised range of UHV chambers have been manufactured for your convenience. The configurable range of skeletons come as standard in either Stainless Steel or Nickel Based Super Alloy i.e Mu-Metal.