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Spares for all metal valves

The RD91 is a manual or motorised precision rotary drive, with a 100mm shaft length. The RD91 is fitted with Index scale and position lock. The drive provides a low backlash, with a smooth continuous primary rotation via a 6.35mm diameter shaft.

All metal Leak Valves with Mallory® sealing pad which offers a superior seal compared to a sapphire seat which can crack causing system vacuum failure. These are recommended for repeatable precise control the flow of gas and these are the preferred choice for system builders who need a reliable cost effective ultra-fine gas inlet control. For service and calibration please see product videos or visit https://vacgen.com/operating-instructions

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reusable Viton® O-ring. This is an ideal solution for keeping the main system under UHV conditions via a gate valve between the load lock and system.

All metal Leak Valves with Mallory® sealing pad which offers a superior seal compared to a sapphire seat which can crack causing system vacuum failure. These are recommended for repeatable precise control the flow of gas and these are the preferred choice for system builders who need a reliable cost effective ultra-fine gas inlet control.

Spares for all metal valves

Spares for all metal valves

All metal miniature leak valve with nickel sealing disc. These are used for course control flow of gas into a vacuum system from an external source and operates to 1x10-9 mbar pressure range.

Spares for all metal valves

Spares for all metal valves

Viewport shutters are used to protect the internal surface of a viewport from build-up of deposition material ejected during thin film processing of substrates. The shutter design is built to allow the widest possible viewing angle, and the maximum level of protection of the viewing area.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering good conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

Right angle all metal valve, offering excellent conductance. The CR series comes with two body types, fully welded CR series or demountable CRD series.

A standardised range of configurable UHV chambers have been designed for your convenience. This configurable range of products, including skeletons, tubes, flanges and gaskets will make designing your chamber a simplistic task and will ensure the costs and lead time of your chamber design are kept within your time frames and your budget. Lead times can be as low as 7 weeks with the configurable range.

Conductor: 1 x 5 mm dia stainless steel. Power feedthroughs are used to carry either high current, or high voltage, or both.

Instrumentation feedthroughs are used to carry electrical signals (Including Thermocouple) which are normally low current and/or voltage. These feedthroughs are available in multi pin versions on either 34mm or 70mm OD flanges. These also come with the option of a European voltage compliant connectors

Instrumentation feedthroughs are used to carry electrical signals (Including Thermocouple) which are normally low current and/or voltage. These feedthroughs are available in multi pin versions on either 34mm or 70mm OD flanges. These also come with the option of a European voltage compliant connectors

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

The VACGEN Hemisphere Bell Chamber can be manufactured from metals such as the high permeability material Nickel-Iron Alloy or Stainless Steel 316L and is suitable for applications such as Preperation or Surface Analysis.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

When operating below the Pirani gauge range (10-3 mbar), an ion gauge can be used to measure UHV pressure. VACGEN offer a range of gauge heads and filament materials to cover all vacuum requirements.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Fixed blank Conflat flange (CF) are available in the full range of sizes. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.

Rotatable blank Conflat flange (CF) consists of two parts, the inner knife edge detail and the outer bolt hole retaining ring which rotates around the inner part. This allows the boltholes to align to mating flanges in any orientation. These are used to blank off unused chamber ports for leak-tight assembly, also allowing End User machining for non standard tube sizes or components.